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蓝菲光学CMOS测试和校准

2017-08-06

For complementary metal-oxide semiconductors (CMOS) typically the semiconductor is positioned at the exit port of the integrating sphere and is shielded from direct illumination by lamps within the sphere system. Illumination is provided indirectly, by multiple diffuse reflections, so that the device is exposed to a uniform irradiance across its active area. 


The illuminance at the exit port of the sphere is factory-calibrated, and a monitor detector attached to the sphere provides a reading of the illuminance presented to the radiometer during the test procedure. The response of the device to this known uniform illuminance is evaluated to verify compliance to specifications, or to identify and correct process problems. 


Different types of light sources may be used in this approach. The sphere may be illuminated with regulated incandescent lamps or the source may be designed to simulate a specified spectral distribution, such as that of average daylight. The integrating sphere may also be coupled to a monochromator for the purpose of spectral characterization. 


Labsphere’s Uniform Source Spheres and Systems test the responsivity and/or quantum efficiency of semiconductor wafers and devices used for photovoltaic or photoconductive applications.


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