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数字精密电子定位系统

名称: 数字精密电子定位系统

型号: PEPS? II

品牌: TMC

  • 详细信息

PEPS® II improves and builds upon TMC’s patented PEPS® (Precision Electronic Positioning System). With the addition of a new digital controller, PEPS® II is easier to use, offers more features, and has an improved user interface. PEPS® II is a digital non-contacting, height control system for TMC pneumatic vibration isolation systems. Such systems normally incorporate mechanical height valves and a mechanical height sensing linkage. Its applications range from semiconductor manufacturing equipment to improve settling time and increase yields, to precision laboratory environments which demand the optimum noise performance and platform stability.

 

 Features:

?Digital control, user-friendly LCD interface
?Non-contacting electro-pneumatic height control for Gimbal Piston™, CSP®, and MaxDamp® vibration isolation systems
?Z-axis position repeatability: 10 microns
?Improved vibration isolation due to the elimination of the lever contact of conventional mechanical height control systems
?Pneumatic feedforward function minimizes Z-axis reaction to X-Y stage motion
?May be tuned to rapidly settle motion induced by X-Y stages
?Optional “VX” feature incorporates inertial sensors for active damping of vertical isolator resonance
? “Soft-dock” compatible. Allows for wafer loading/unloading without kinematic mounting
?roportional electronic valves. No pulse noise introduced by “on-off” or conventional electronic valves
?Plumbed exhaust line for clean disposal of waste air
?Logic dock control and status


Specifications:

Physical Dimensions

PEPS® II Controller 1.72" (43.7mm) H x 8.0" (203mm) W x 9.4" (240 mm) D

Weights

PEPS® II Controller: approximately 3.0 lb (1.2 kg)

Environmental
(refer to EN 61010-1: 1993,
EN 61010-1/A2: 1995)

For indoor use only, up to an elevation of 2,000 m (6560 ft.)
Maximum allowable temperature range: 5° C to 35° C
Maximum allowable humidity: 80% up to 31° C, decreasing linearly to 50% relative humidity at 40° C
Tolerance in main supply voltage: 85 VAC - 240 VAC
Over voltage category: 2
Pollution degree (IEC 664): 2
Ventilation requirements: 25 mm clearance on sides, 0 mm top and bottom

Power Requirements

Power input voltage range: 90-230 VAC
Input frequency range: 50-60 Hz

PEPS® II User Interface 
(Front Panel)

Power switch
4 menu buttons 
LCD display 20 x 2 characters 
2 diagnostic sockets (BNC-type) 
Three-color status LED 
USB port

PEPS® II Interface
(Rear Panel)

AC power entry with EMI filter
1 air INPUT snap-in port for 1/4" O.D. tubing 
1 air OUTPUT (Exhaust) snap-in port for 1/4" O.D. tubing 
4 air snap-in ports for 1/4" O.D. tubing (one per isolator) 
DB-25 male inputs-outputs and feedforward socket
1 Phoenix 0.2" pitch 6 pins GREEN header (vertical proximity sensors) 
1 Phoenix 3.5 mm pitch 6 pins BLACK header (horizontal proximity sensors) 
Grounding threaded stud (#10-32 thread) 
DB-25 F socket: 1x digital Input, 3x geophone sensors interface (“-VX” option) 
DB-25 F socket: 1x digital input, 3x current output proximity sensors (optional)

PEPS® II
Performance 
Specifications

Analog inputs (unipolar): 8 x 12 bit (16 bit using over sampling), 0…3.0 V full scale
Analog inputs (feedforward): 5 x 12 bit 
   (16 bit using over sampling), ±9 V full scale
Analog inputs (unipolar) protection: +5 Volts, -0.5 V clipping
Analog input (feedforward) protection: ±15 Volts clipping
Analog outputs: 4 x 12 bit (16 bit with over sampling), 0…3.0 V full scale
Analog outputs (OPTIONAL): 8 x 16 bit, 0…3.0 V full scale
Analog output protection: indefinite short circuit protection, +5 Volts clipping
Digital input voltage rating: 0…+3.3 V, +5 V tolerant (+5 Volts clipping)
Digital output rating: 0…+3.3 V, 20 mA max.
Digital I/O protection: +5 Volts, -0.5 Volts clipping
External available power: +5 VDC, 2.0 A max; +15 VDC, 1.0 A max. (20 Watt max)
Communication port: USB, appears as RS-232 on PC
Processor: ARM7TDMI / 41.78 MHz
Control loop rate: 100 Hz - 2.0 KHz
Proximity sensors: 3x vertical, (3x horizontal optional) Eddy current, NAMUR 0-20 mA output
Velocity sensors - geophones (“-VX” option): 3x vertical, current output

Pneumatic 
Specifications

Long-term height stability: ±50 microns
Long-term tilt stability: ±50 micro radians
Servo valves: 4 x 2-way variable-orifice proportional servo valves
Valving technique: pure class-A 
Maximum input pressure: 120 PSI or 8.3 Bar or 830 KPa
Nominal air consumption: 60 slpm (2 scfm)
Air requirements: clean, dry air, filtered to 20 microns or better
Fail safe: isolators deflate on power failure or power off
Pneumatic fittings: 'one touch' quick fittings for 1/4" O.D. hose


Performance:



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